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Inês S. Garcia received the Ph.D. degree in electronics and computer engineering from the University of Minho, Guimarães, Portugal, in 2024. She is a MicroElectroMechanical Systems (MEMS) Research Engineer with the Integrated Micro and Nanotechnologies at INL. Her expertise is focused on the design, fabrication, and characterisation of MOEMS and MEMS devices. Her research interests range from inertial sensors ( e.g., acceleration and shock sensing based on pull-in transduction) to optical scanning and splitting devices. She has extensive experience in SOI-based microfabrication, taking advantage of different lithography techniques, such as grayscale to nanoimprint, to create self-aligned multilevel MEMS structures.
Identificação

Identificação pessoal

Nome completo
Inês Sofia Moreira Garcia

Nomes de citação

  • Garcia, Inês Sofia

Identificadores de autor

Ciência ID
F710-8D33-EEE1
ORCID iD
0000-0002-4605-6961

Domínios de atuação

  • Ciências da Engenharia e Tecnologias - Engenharia Eletrotécnica, Eletrónica e Informática
Formação
Grau Classificação
2019/09 - 2024/06
Concluído
Engenharia Electrónica e de Computadores (Doutoramento)
Especialização em Especialidade: Instrumentação e Microssistemas Eletrónicos
Universidade do Minho, Portugal
"MEMS Scanners with Diffractive Optical Elements for LiDAR Applications" (TESE/DISSERTAÇÃO)
2019
Concluído
Engenharia Eletrónica Industrial e Computadores (Mestrado)
Especialização em Sem especialização
Universidade do Minho, Portugal
"Acelerómetro MEMS de alta precisão para miro-satélites " (TESE/DISSERTAÇÃO)
20
Percurso profissional

Ciência

Categoria Profissional
Instituição de acolhimento
Empregador
2024/08/16 - Atual Investigador (Investigação) International Iberian Nanotechnology Laboratory, Portugal
International Iberian Nanotechnology Laboratory, Portugal
2019/10/15 - 2023/10/15 Investigador (Investigação) International Iberian Nanotechnology Laboratory, Portugal

Docência no Ensino Superior

Categoria Profissional
Instituição de acolhimento
Empregador
2020/02 - Atual Assistente Convidado (Docente Universitário) Universidade do Minho - Campus de Azurém, Portugal
Universidade do Minho, Portugal
Projetos

Projeto

Designação Financiadores
2024/08/20 - Atual R2UTechnologies - modular systems
Investigador
International Iberian Nanotechnology Laboratory, Portugal
Em curso
2021/12/01 - Atual BE.Neutral - Agenda de Mobilidade para a neutralidade carbónica nas cidades
Investigador
International Iberian Nanotechnology Laboratory, Portugal
Em curso
2024/08/19 - 2026/06/30 ATE - Aliança para a Transição Energética
Desenvolvimento técnico
International Iberian Nanotechnology Laboratory, Portugal
Em curso
2022/01/01 - 2024/11/30 neXt Sense - Safety Connected and Automated Vehicles
Investigador
Concluído
2022/12/01 - 2023/06/30 FDPanel - Future Door Panel
Desenvolvimento técnico
International Iberian Nanotechnology Laboratory, Portugal
Autoridade de Gestão do Programa Operacional Competitividade e Internacionalização
Concluído
2021/07/01 - 2023/06/30 (LINK4S)ustainability – A new generation connectivity system for creation and integration of networks of objects for new sustainability paradigms
Investigador
International Iberian Nanotechnology Laboratory, Portugal
Autoridade de Gestão do Programa Operacional Competitividade e Internacionalização
Concluído
2020/11/01 - 2023/06/29 uPGRADE – miniaturized Prototype for GRavity field Assessment using Distributed Earth-orbiting assets
Investigador
International Iberian Nanotechnology Laboratory, Portugal
Fundação para a Ciência e a Tecnologia

Autoridade de Gestão do Programa Operacional Competitividade e Internacionalização
Concluído
2019/10/30 - 2021/12/31 Sensible Car: Sensores Inteligentes para a Condução Autónoma
Investigador
Concluído
Produções

Publicações

Artigo em conferência
  1. Inês S. Garcia; Filipa C. Mota; Jorge M. Pereira; Fahimullah Khan; Carlos Ferreira; Jorge Cabral; José Fernandes; Rosana A. Dias; Filipe S. Alves. "Near Zero-Power Omnidirectional, In-Plane Pull-In-Based MEMS Switch". 2025.
    10.1109/transducers61432.2025.11110619
  2. Inês S. Garcia; Mubasher Saleem; Filipa C. Mota; Nélson Castro; Pablo Valentim; Rui Madeira; Alexandre Correia; et al. "High Sensitivity and Wide Bandwidth in Multi-Mass MEMS Accelerometers". 2025.
    10.1109/transducers61432.2025.11110523
  3. Jorge Pereira; Inês S. Garcia; Gabriel Ribeiro; José Fernandes; Filipe S. Alves; Marco Martins; André Cardoso; Rosana A. Dias. "Small Footprint Temperature Sensing NFC Tag". 2024.
    10.3390/proceedings2024097182
  4. Inês Pires; Inês S. Garcia; João Vieira; Zeev Zalevsky; Carlos Calaza; Filipe S. Alves; Rosana A. Dias. "High-Frequency Grating-Based Microelectromechanical Systems Actuator". 2024.
    10.3390/proceedings2024097155
  5. Diogo E. Aguiam; Inês S. Garcia; Edoardo Sotgiu; Filipe S. Alves. "Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication". 2024.
    10.3390/proceedings2024097101
  6. Ribeiro, T.; Gonçalves, F.; Garcia, I.; Lopes, G.; Ribeiro, A.F.. "Q-Leaming for Autonomous Mobile Robot Obstacle Avoidance". 2019.
    10.1109/ICARSC.2019.8733621
  7. Garcia, I.S.; Moreira, E.E.; DIas, R.A.; Gaspar, J.; Alves, F.S.; Rocha, L.A.. "Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction". 2019.
    10.1109/TRANSDUCERS.2019.8808247
  8. Garcia, I.; Gonçalves, F.; Ribeiro, T.; Fernandes, P.; Rocha, C.; Boucinha, R.; Lopes, G.; Ribeiro, A.F.. "Autonomous 4DOF Robotic Manipulator Prototype for Industrial Environment and Human Cooperation". 2019.
    10.1109/ICARSC.2019.8733639
  9. Ribeiro, T.; Garcia, I.; Pereira, D.; Ribeiro, J.; Lopes, G.; Ribeiro, A.F.. "Development of a prototype robot for transportation within industrial environments". 2017.
    10.1109/ICARSC.2017.7964074
Artigo em revista
  1. Inês S. Garcia; Carlos Ferreira; José Queiroz; Carlos Silva; Alexandre Correia; André Albuquerque; Diogo E. Aguiam; et al. "All-silicon multispot 2D beam steering MEMS mirror". IEEE Sensors Journal (2026): https://doi.org/10.1109/JSEN.2026.3664170.
    10.1109/JSEN.2026.3664170
  2. Chaoyang Zhang; João Encarnação; Rosana A. Dias; Tiago Hormigo; Ines S. Garcia; Filipe S. Alves; Byron Tapley. "MEMS accelerometer for satellite gravimetry". Advances in Space Research (2025): https://doi.org/10.1016/j.asr.2025.09.009.
    10.1016/j.asr.2025.09.009
  3. Fahimullah Khan; Inês S. Garcia; Filipa C. Mota; Muhammad Mubasher Saleem; Jorge M. Pereira; José Fernandes; Jorge Cabral; et al. "Highly Tunable, Low-g MEMS Inertial Switch for Power-Efficient IoT Wake-Up Functions". IEEE Sensors Journal (2025): https://doi.org/10.1109/JSEN.2025.3578656.
    10.1109/JSEN.2025.3578656
  4. Manuel J. L. F. Rodrigues; Inês S. Garcia; Joana D. Santos; Filipa C. Mota; Filipe S. Alves; Diogo E. Aguiam. "Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup". Sensors (2025): https://doi.org/10.3390/s25154627.
    10.3390/s25154627
  5. Filipa C. Mota; Inês S. Garcia; Aritz Retolaza; Dimitri E. Santos; Patrícia C. Sousa; Diogo E. Aguiam; Rosana A. Dias; et al. "Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications". Micromachines (2024): https://doi.org/10.3390/mi16010057.
    10.3390/mi16010057
  6. Inês S. Garcia; José Fernandes; José B. Queiroz; Carlos Calaza; José Moreira; Rosana A. Dias; Filipe S. Alves. "Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers". Micro and Nano Engineering 19 (2023): 100204-100204. http://dx.doi.org/10.1016/j.mne.2023.100204.
    10.1016/j.mne.2023.100204
  7. Joao Cunha; Inês S. Garcia; Joana D. Santos; José Fernandes; Pedro González-Losada; Carlos Silva; João Gaspar; et al. "Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds". Micro and Nano Engineering 19 (2023): 100182-100182. http://dx.doi.org/10.1016/j.mne.2023.100182.
    10.1016/j.mne.2023.100182
  8. "Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography". Micro and Nano Engineering 14 (2022): 100111-100111. http://dx.doi.org/10.1016/j.mne.2022.100111.
    10.1016/j.mne.2022.100111
  9. Ribeiro, Tiago; Gonçalves, Fernando; Garcia, Inês Sofia Moreira; Lopes, Gil; Ribeiro, A. Fernando. "CHARMIE: a collaborative healthcare and home service and assistant robot for elderly care". (2021): https://hdl.handle.net/1822/74525.
    10.3390/app11167248
  10. Ines S. Garcia; Carlos Ferreira; Joana D. Santos; Marco Martins; Rosana A. Dias; Diogo E. Aguiam; Jorge Cabral; Joao Gaspar. "Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography". Journal of Microelectromechanical Systems 29 5 (2020): 734-740. https://doi.org/10.1109/JMEMS.2020.3006746.
    10.1109/JMEMS.2020.3006746
  11. Gonçalves, F.; Ribeiro, T.; Garcia, I.; Ribeiro, F.A.; Monteiro, C.; Lopes, G.. "Development of an anthropomorphic mobile manipulator with human, machine and environment interaction". FME Transactions 47 4 (2019): 790-801. http://www.scopus.com/inward/record.url?eid=2-s2.0-85070198018&partnerID=MN8TOARS.
    10.5937/fmet1904790F
Tese / Dissertação
  1. Garcia, Inês Sofia Moreira. "MEMS scanners with diffractive optical elements for LiDAR applications". Doutoramento, 2024. https://hdl.handle.net/1822/92455.
  2. Garcia, Inês Sofia Moreira. "High precision MEMS accelerometer for microsatellites". Mestrado, 2019. https://hdl.handle.net/1822/64779.

Outros

Outra produção
  1. LAR@Home 2025 Team Description Paper. This paper describes the development and progresses of the team LAR@Home from the University of Minho, Portugal, for the RoboCup@Home competition that will take place in Salvador, Brazil, in 2025. After the robot’s participation in the 2023 and 2024 editions, the main efforts centred on improving and developing the localisation and navigation system, developing a GUI system that can be used in com. 2024. Ribeiro, Tiago Alcântara; Silva, Bruno; Martins, Renata; Silva, Rui; Martins, Diogo; Martins, José; Garcia, Inês Sofia Moreira; et al. https://hdl.handle.net/1822/96118.
    https://doi.org/10.5281/zenodo.15178542
  2. LAR@Home 2025 Team Description Paper. This paper describes the development and progresses of the team LAR@Home from the University of Minho, Portugal, for the RoboCup@Home competition that will take place in Salvador, Brazil, in 2025. After the robot’s participation in the 2023 and 2024 editions, the main efforts centred on improving and developing the localisation and navigation system, developing a GUI system that can be used in com. 2024. Ribeiro, Tiago Alcântara; Silva, Bruno; Martins, Renata; Silva, Rui; Martins, Diogo; Martins, José; Garcia, Inês Sofia Moreira; et al. https://hdl.handle.net/1822/96118.
    https://doi.org/10.5281/zenodo.15178542
  3. LAR@Home 2024 Team Description Paper. This paper describes the development and progresses of the team LAR@Home from the University of Minho, Portugal, for the RoboCup@Home competition that will take place in Eindhoven, Netherlands, in 2024. After the robot’s first participation in the 2023 edition, the main efforts focus on improving the mechanical and electronic structure in order to highlight its anthropomorphic approach and additio. 2023. Ribeiro, Tiago Alcântara; Silva, Bruno; Martins, Renata; Silva, Rui; Martins, Diogo; Oliveira, Nuno; Garcia, Inês Sofia Moreira; et al. https://hdl.handle.net/1822/96116.
    https://doi.org/10.5281/zenodo.15178581